labarai

Fasaha yankan lu'u-lu'u kuma ana kiranta da fasahar yanke katsewa.Yana da amfani da electroplating ko guduro bonding Hanyar na lu'u-lu'u abrasive ƙarfafa a saman karfe waya, lu'u-lu'u waya aiki kai tsaye a saman silicon sanda ko silicon ingot don samar da nika, don cimma sakamakon yankan.Yankewar waya na lu'u-lu'u yana da halaye na saurin yankan sauri, daidaitaccen yankan da ƙarancin asarar kayan abu.

A halin yanzu, kasuwar kristal guda ɗaya don yankan wafer siliki ta sami cikakkiyar karbuwa, amma kuma ta ci karo da ita a cikin aiwatar da haɓakawa, wanda daga cikinsu farar karammiski ita ce matsala ta gama gari.Dangane da wannan, wannan takarda ta mayar da hankali kan yadda ake hana wayan lu'u-lu'u yankan monocrystalline silicon wafer velvet farin matsala.

Tsarin tsaftacewa na yankan wariyar siliki ta monocrystalline na lu'u-lu'u shine cire wafer siliki da aka yanke ta kayan aikin injin waya daga farantin guduro, cire tsiri na roba, da tsaftace wafer siliki.Kayan aikin tsaftacewa shine na'urar tsaftacewa ta farko (na'urar degumming) da injin tsaftacewa.Babban tsarin tsaftacewa na na'ura mai tsaftacewa shine: ciyarwa-spray-spray- tsaftacewa-tsaftacewa-tsaftataccen ruwa mai tsafta-rashin ciyarwa.Babban tsarin tsaftacewa na injin tsaftacewa shine: ciyar da ruwa mai tsabta mai tsabta - ruwa mai tsabta - ruwa mai tsabta - alkali wanke-alkali wanki - tsaftace ruwa mai tsabta - ruwa mai tsabta - pre-dehydration (hankali dagawa) - bushewa - ciyarwa.

Ka'idar yin karammiski guda-crystal

Monocrystalline silicon wafer shine halayyar anisotropic lalata na monocrystalline silicon wafer.Ƙa'idar amsawa ita ce ma'aunin amsa sinadarai mai zuwa:

Si + 2NaOH + H2O = Na2SiO3 + 2H2↑

Ainihin, tsarin samuwar fata shine: NaOH bayani don nau'in lalata daban-daban na nau'in kristal daban-daban, (100) saurin lalata ƙasa fiye da (111), don haka (100) zuwa wafer siliki na monocrystalline bayan lalatawar anisotropic, ƙarshe an kafa shi akan farfajiya don (111) Mazugi mai gefe huɗu, wato tsarin "Piramid" (kamar yadda aka nuna a adadi 1).Bayan da aka kafa tsarin, lokacin da hasken ya faru zuwa gangaren dala a wani kusurwa, hasken zai nuna zuwa gangara a wani kusurwa, yana samar da na biyu ko fiye da sha, don haka yana rage haske a saman silin siliki. , wato, tasirin tarkon haske (duba Hoto 2).Mafi kyawun girman girman da daidaituwa na tsarin "dala", mafi kyawun tasirin tarko, da kuma raguwar fitowar fili na wafer silicon.

Hoto 1: Micromorphology na monocrystalline silicon wafer bayan samar da alkali

Hoto 2: Ka'idar tarkon haske na tsarin "dala".

Analysis na guda crystal whitening

Ta hanyar duba microscope na lantarki akan farar silicon wafer, an gano cewa dala microstructure na farin wafer a yankin ba a samo asali ba, kuma saman yana da alama yana da Layer na ragowar "waxy", yayin da tsarin dala na fata. a cikin farin yanki na wafer siliki iri ɗaya an samo shi mafi kyau (duba hoto 3).Idan akwai saura a saman monocrystalline silicon wafer, da surface zai yi saura yankin "dala" tsarin size da uniformity tsara da kuma tasiri na al'ada yankin bai isa ba, sakamakon saura karammiski surface reflectivity ne mafi girma fiye da na al'ada yankin. yanki tare da babban haske idan aka kwatanta da na al'ada a cikin abin gani yana nunawa kamar fari.Kamar yadda ake iya gani daga nau'in rarraba nau'in fata, ba na yau da kullum ba ne ko na yau da kullum a cikin babban yanki, amma kawai a cikin yankunan gida.Ya kamata ya zama cewa ba a tsaftace gurɓataccen gurɓataccen gida a saman siliki na siliki ba, ko kuma yanayin da ake ciki na siliki yana haifar da gurɓataccen abu na biyu.

Hoto 3: Kwatanta bambance-bambancen ƙananan tsarin yanki a cikin wafers farar siliki

Filayen wayan siliki na yankan wayar lu'u-lu'u ya fi santsi kuma lalacewar ta yi ƙarami (kamar yadda aka nuna a hoto 4).Idan aka kwatanta da turmi silicon wafer, da dauki gudun alkali da lu'u-lu'u waya yankan silicon wafer surface ne a hankali fiye da na turmi yankan monocrystalline silicon wafer, don haka tasiri na surface saura a kan karammiski sakamako ne mafi bayyane.

Hoto 4: (A) Fannin micrograph na turmi yanke silikon wafer (B) saman micrograph na waya mai yanke silikon wafer

Babban saura tushen lu'u-lu'u waya-yanke silicon wafer surface

(1) Coolant: manyan abubuwan da ake amfani da su na yankan waya na lu'u-lu'u sune surfactant, dispersant, defamagent da ruwa da sauran abubuwan.Ruwan yankan tare da kyakkyawan aiki yana da kyakkyawan dakatarwa, watsawa da sauƙin tsaftacewa.Surfactants yawanci suna da mafi kyawun kaddarorin hydrophilic, wanda ke da sauƙin tsaftacewa a cikin tsarin tsabtace wafer na silicon.Ci gaba da motsawa da wurare dabam dabam na waɗannan addittu a cikin ruwa za su samar da adadi mai yawa na kumfa, wanda zai haifar da raguwar kwararar mai sanyaya, yana shafar aikin sanyaya, da kuma kumfa mai tsanani har ma da matsalolin matsalolin kumfa, wanda zai yi tasiri sosai ga amfani.Sabili da haka, yawanci ana amfani da mai sanyaya tare da mai lalata kumfa.Don tabbatar da aikin lalata, siliki na gargajiya da polyether yawanci suna da ƙarancin hydrophilic.Mai ƙarfi a cikin ruwa yana da sauƙin haɓakawa kuma ya kasance a saman silin siliki a cikin tsaftacewa na gaba, yana haifar da matsalar farin tabo.Kuma bai dace da manyan abubuwan sanyaya ba, don haka, dole ne a sanya shi cikin sassa biyu, Main abubuwan da aka gyara da kuma defoaming wakilai an ƙara su a cikin ruwa, A cikin aiwatar da amfani, bisa ga yanayin kumfa, Ba a iya sarrafa ƙimar ƙima. amfani da sashi na magungunan antifoam, Za a iya sauƙaƙe don ba da izinin wuce gona da iri na wakilai na anoaming, Yana haifar da karuwa a cikin ragowar siliki wafer, Hakanan ya fi dacewa don aiki, Duk da haka, saboda ƙarancin farashin albarkatun ƙasa da wakili mai lalata. kayan, Saboda haka, mafi yawan cikin gida coolant duk amfani da wannan dabara tsarin;Wani coolant yana amfani da wani sabon defoaming wakili, Zai iya zama da jituwa tare da babban aka gyara, Babu tarawa, iya yadda ya kamata da kuma quantitatively sarrafa ta adadin, iya yadda ya kamata hana wuce kima amfani, da darussan ne ma sosai dace yi, Tare da dace tsaftacewa tsari, Its Za a iya sarrafa ragowar zuwa ƙananan matakan, A Japan da ƴan masana'antun cikin gida sun ɗauki wannan tsarin tsarin, Duk da haka, saboda yawan farashin albarkatun kasa, Amfanin farashinsa ba a bayyane yake ba.

(2) Manna da guduro version: a cikin mataki na gaba na aikin yankan waya na lu'u-lu'u, An yanke wafer siliki kusa da ƙarshen mai shigowa a gaba, Ba a yanke waƙar silicon a ƙarshen fitarwa ba tukuna, Lu'u-lu'u da aka yanke na farko. waya ya fara yanke zuwa roba Layer da guduro farantin, Tun da silicon sanda manne da guduro jirgin ne biyu epoxy guduro kayayyakin, Its softening batu ne m tsakanin 55 da kuma 95 ℃, Idan softening batu na roba Layer ko guduro. farantin yana da ƙasa, yana iya sauƙi zafi yayin aikin yankewa kuma ya sa ya zama mai laushi da narke, Haɗe da waya na karfe da saman siliki, Sanadin yanke ikon layin lu'u-lu'u ya ragu, Ko kuma ana karɓar wafern siliki tabo da guduro, Da zarar an haɗe, yana da matukar wahala a wanke kashe, Irin wannan gurɓataccen abu yana faruwa ne a kusa da ƙarshen wafer silicon.

(3) silicon foda: a kan aiwatar da lu'u-lu'u yankan waya zai samar da mai yawa silicon foda, tare da yankan, turmi coolant foda abun ciki zai zama mafi girma, a lõkacin da foda ne babban isa, zai bi da silicon surface. da lu'u lu'u-lu'u yankan siliki foda size da girman kai ga ta sauki adsorption a kan silicon surface, sa shi da wuya a tsaftace.Saboda haka, tabbatar da sabuntawa da ingancin mai sanyaya kuma rage abun ciki na foda a cikin mai sanyaya.

(4) tsaftacewa wakili: da halin yanzu amfani da lu'u-lu'u yankan waya masana'antun mafi yawa ta yin amfani da turmi yankan a lokaci guda, mafi yawa amfani da turmi yankan prewashing, tsaftacewa tsari da tsaftacewa wakili, da dai sauransu, guda lu'u-lu'u yankan fasahar daga yankan inji, samar da wani turmi yankan yankan. cikakken sa na line, coolant da turmi yankan da babban bambanci, don haka daidai tsaftacewa tsari, tsaftacewa wakili sashi, dabara, da dai sauransu ya kamata don lu'u-lu'u yankan waya yin daidai daidaita.Wakilin tsaftacewa wani muhimmin al'amari ne, ainihin ma'auni mai tsaftacewa na asali surfactant, alkalinity bai dace da tsaftacewa da lu'u-lu'u yankan silicon wafer ba, ya kamata ya kasance don saman lu'u-lu'u na silicon wafer, abun da ke ciki da ragowar farfajiyar wakili mai tsaftacewa, da kuma ɗauka tare da shi. tsarin tsaftacewa.Kamar yadda aka ambata a sama, abun da ke ciki na defoaming wakili ba a bukatar a turmi yankan.

(5) Ruwa: yankan waya na lu'u-lu'u, wanke-wanke da tsaftace ruwa mai cike da ruwa yana ƙunshe da ƙazanta, ana iya haɗa shi zuwa saman wafer silicon.

Rage matsalar sa gashi fari ya bayyana shawarwari

(1) Don amfani da na'ura mai sanyaya tare da watsawa mai kyau, kuma ana buƙatar mai sanyaya don amfani da ƙarancin ƙarancin ƙarancin ƙarancin ƙarancin don rage ragowar abubuwan sanyaya a saman wafer silicon;

(2) Yi amfani da manne mai dacewa da farantin guduro don rage gurɓatar wafer silicon;

(3) Ana narke mai sanyaya da ruwa mai tsafta don tabbatar da cewa babu saura ƙazanta a cikin ruwan da aka yi amfani da shi;

(4) Domin saman lu'u-lu'u waya yanke silicon wafer, yi amfani da aiki da tsaftacewa sakamako mafi dace tsaftacewa wakili;

(5) Yi amfani da lu'u-lu'u coolant online dawo da tsarin don rage abun ciki na silicon foda a cikin yankan tsari, don haka yadda ya kamata sarrafa sauran silicon foda a kan silicon wafer surface na wafer.A lokaci guda kuma, yana iya haɓaka haɓakar yanayin zafin ruwa, kwarara da lokaci a cikin riga-kafin wanka, don tabbatar da cewa an wanke foda na silicon a cikin lokaci.

(6) Da zarar an sanya wafer siliki a kan teburin tsaftacewa, dole ne a bi da shi nan da nan, kuma a kiyaye wafer siliki a duk lokacin aikin tsaftacewa.

(7) Gilashin siliki yana kiyaye saman jika a cikin aiwatar da lalata, kuma ba zai iya bushewa ta halitta ba.(8) A cikin tsarin tsaftacewa na siliki na siliki, lokacin da aka fallasa a cikin iska za a iya ragewa har zuwa yadda zai yiwu don hana furen fure a saman silin siliki.

(9) Ma'aikatan tsaftacewa ba za su tuntuɓi kai tsaye saman wafer silicon ba yayin aikin tsaftacewa gaba ɗaya, kuma dole ne su sa safofin hannu na roba, don kada a samar da bugu na yatsa.

(10) A cikin tunani [2], ƙarshen baturi yana amfani da hydrogen peroxide H2O2 + alkali NaOH tsaftacewa tsari bisa ga girman rabo na 1:26 (3% NaOH bayani), wanda zai iya rage yadda ya faru na matsalar.Ka'idarsa tayi kama da maganin tsaftacewa na SC1 (wanda akafi sani da ruwa 1) na wafer silicon semiconductor.Babban tsarinsa: fim ɗin iskar shaka a kan siliki wafer surface an kafa shi ta hanyar iskar shaka na H2O2, wanda aka lalata ta NaOH, kuma oxidation da lalata suna faruwa akai-akai.Sabili da haka, ƙwayoyin da aka haɗe zuwa foda na silicon, resin, karfe, da dai sauransu) kuma sun fada cikin ruwa mai tsabta tare da lalata Layer;saboda iskar oxygen da H2O2, kwayoyin halitta a kan wafer surface an bazu zuwa CO2, H2O da kuma cire.Wannan tsari na tsaftacewa ya kasance masana'antun wafer na silicon suna amfani da wannan tsari don aiwatar da tsaftacewar waya ta lu'u-lu'u yankan wafer silicon wafer, wafer silicon a cikin gida da Taiwan da sauran masana'antun batir na yin amfani da gunaguni na farin karammiski.Akwai kuma masana'antun batir sun yi amfani da irin wannan tsari na tsabtace karammiski, kuma suna sarrafa kamannin farar karammiski yadda ya kamata.Ana iya ganin cewa wannan tsarin tsaftacewa yana ƙarawa a cikin tsarin tsaftacewa na siliki don cire ragowar silicon wafer don magance matsalar farin gashi a ƙarshen baturi.

ƙarshe

A halin yanzu, yankan wayar lu’u-lu’u ya zama babbar fasahar sarrafa shi a fannin yankan lu’u-lu’u, amma a ci gaba da inganta matsalar yin farin velvet na damun silikon wafer da masu kera batir, lamarin da ya kai ga masu kera batir su yanke siliki. wafer yana da ɗan juriya.Ta hanyar kwatancen kwatancen yankin farin, galibi ana haifar da shi ne ta hanyar ragowar da ke saman wafer silicon.Don mafi kyawun hana matsalar wafer siliki a cikin tantanin halitta, wannan takarda tana yin nazari akan yuwuwar tushen gurɓataccen ƙasa na wafer silicon, da shawarwarin haɓakawa da matakan samarwa.Dangane da lamba, yanki da siffar fararen spots, ana iya bincikar abubuwan da ke haifar da ingantawa.Musamman shawarar yin amfani da hydrogen peroxide + alkali tsaftacewa tsari.Kwarewar da ta yi nasara ta tabbatar da cewa zai iya magance matsalar ta hanyar yin amfani da wariyar lu'u lu'u-lu'u yankan wafer siliki yin farin karammiski, don yin la'akari da manyan masana'antu da masana'antun.